Abstract

Latent images obtained by deep-ultraviolet (DUV) patterning and post-exposure bake in the polymer system poly(t-butylmethacrylate) (PTBMA) resist/triphenyl sulfonium photoacid generator are characterized by infrared near-field microscopy (IR-NSOM). Chemical sub-group specificity is achieved in the infrared near-field images by using wavelengths tuned on the OH absorption band of the poly(methacrylate acid) (PMAA) resulting from the photoacid-catalyzed decomposition of t-butoxycarbonyl groups. The experimental images of the patterned thin polymer film are compared with predictions based on scalar diffraction theory calculations for the initial light illumination step through the mask. Partial disagreement between the theory and the experiment is observed, but only for certain line/space dimensions of the pattern. The results suggest a structure-dependent chemistry during the latent image development.

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Dragnea Research is at the forefront of multidisciplinary innovation, exploring the intersection of nanoscale optics, quantum photonics, physical virology, and bio-architected hybrid materials with 3D nanoscale order. Their latest publications highlight groundbreaking advancements in fields such as self-assembly, optics and spectroscopy, and the physical manipulation of virus-like particles (VLPs) for chemical imaging and surface modifications. Drawing from their expertise in using near-field scanning techniques and laser-induced effects, these works showcase how nanoscale phenomena can be harnessed for applications in material science, virology, and beyond. The accompanying visual mosaic underscores the diverse range of their research, from probing molecular dynamics to the development of 3D-ordered structures, all united by a commitment to pushing the boundaries of applied and theoretical science.