Abstract

We report transmission infrared near-field scanning microscopy ~IR-NSOM! imaging of chemically amplified photoresist polymers patterned by ultraviolet exposure. Chemical specificity was attained using infrared wavelengths tuned to the 3 mm OH stretch absorption band of the polymer, a band sensitive to the chemical changes characteristic of the lithographic photochemical process of this material. Contrast mechanisms are discussed together with the IR-NSOM specifics, such as the fabrication of an infrared near-field probe with high throughput, which lead to an attainable resolution of l/10 and a transmission sensitivity of 1%.

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Dragnea Research is at the forefront of multidisciplinary innovation, exploring the intersection of nanoscale optics, quantum photonics, physical virology, and bio-architected hybrid materials with 3D nanoscale order. Their latest publications highlight groundbreaking advancements in fields such as self-assembly, optics and spectroscopy, and the physical manipulation of virus-like particles (VLPs) for chemical imaging and surface modifications. Drawing from their expertise in using near-field scanning techniques and laser-induced effects, these works showcase how nanoscale phenomena can be harnessed for applications in material science, virology, and beyond. The accompanying visual mosaic underscores the diverse range of their research, from probing molecular dynamics to the development of 3D-ordered structures, all united by a commitment to pushing the boundaries of applied and theoretical science.